AlGaAs layers grown by molecular beam epitaxy on GaAs substrates were
investigated before and after high hydrostatic pressure (1.2 GPa) at h
igh temperature (770 K) treatment (RP-HT treatment). An influence of H
P-HT treatment on the properties of the AlGaAs/GaAs system was studied
by lattice parameter measurements using the high resolution diffracto
meter and by X-ray topography. Observed changes in the lattice paramet
er of the AlGaAs layers after HP-HT treatment are related to the strai
n relaxation and explained by the creation of misfit dislocations and
other extended defects which are visible on the topographs.