Ks. Boutros et al., DIRECT WRITING OF GAAS OPTICAL WAVE-GUIDES BY LASER-ASSISTED CHEMICAL-VAPOR-DEPOSITION, Applied physics letters, 68(15), 1996, pp. 2041-2042
We demonstrate the direct writing of GaAs waveguide structures by sele
ctive area deposition using laser-assisted chemical vapor deposition (
LCVD). The multimode waveguides have a Gaussian shape and a very smoot
h surface, and they exhibit losses as low as 5.4 dB/cm. The LCVD techn
ique offers the capability of selective growth of independent device s
tructures, and hence the capability of monolithic integration of these
devices for optoelectronic applications. (C) 1996 American Institute
of Physics.