INTEGRATED DEVICES MAKE AN OPTICAL BENCH ON A CHIP

Citation
Mc. Wu et al., INTEGRATED DEVICES MAKE AN OPTICAL BENCH ON A CHIP, Laser focus, 32(2), 1996, pp. 64-68
Citations number
7
Categorie Soggetti
Optics
Journal title
ISSN journal
10438092
Volume
32
Issue
2
Year of publication
1996
Pages
64 - 68
Database
ISI
SICI code
1043-8092(1996)32:2<64:IDMAOB>2.0.ZU;2-Y
Abstract
Batch-mode lithographic fabrication methods produce free-space micro-o ptical bench components on a chip.