SCANNING ELECTRON-MICROSCOPE CALIBRATION WITH INPUT DATA CHECKING

Authors
NOVIKOV YA RAKOV AV STEKOLIN IY
Citation
Ya. Novikov et al., SCANNING ELECTRON-MICROSCOPE CALIBRATION WITH INPUT DATA CHECKING, Measurement techniques, 38(6), 1995, pp. 697-700
Citations number
9
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement techniques → ACNP
ISSN journal
05431972
Volume
38
Issue
6
Year of publication
1995
Pages
697 - 700
Database
ISI
SICI code
0543-1972(1995)38:6<697:SECWID>2.0.ZU;2-M
Abstract
A method is proposed for calibrating SEM with checks on the initial da ta at the start of calibration. A criterion is formulated for detectin g focussing errors during SEM measurements.