HIGH-TC SUPERCONDUCTING LINEAR-ARRAY IR-DETECTORS USING YBA2CU3O7-DELTA THIN-FILMS

Authors
YI XJ MAI ZH ZHAO XR ZHOU FQ LIU LQ
Citation
Xj. Yi et al., HIGH-TC SUPERCONDUCTING LINEAR-ARRAY IR-DETECTORS USING YBA2CU3O7-DELTA THIN-FILMS, International journal of infrared and millimeter waves, 17(4), 1996, pp. 705-710
Citations number
9
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied",Optics
Journal title
International journal of infrared and millimeter waves → ACNP
ISSN journal
01959271
Volume
17
Issue
4
Year of publication
1996
Pages
705 - 710
Database
ISI
SICI code
0195-9271(1996)17:4<705:HSLIUY>2.0.ZU;2-5
Abstract
8-element linear array IR detectors based on high Tc superconducting f ilms have been fabricated. The thin films were deposited by magnetron sputtering on ZrO2 substrates and patterned by standard photolithograp hic technique forming microbridge structure. An average detectivity of 1.85 X 10(9) cmHz(1/2)W(-1) with a variance of less than 20% in the d etector-to-detector detectivity of the array has been obtained at the operating temperature of 84 K. A bolometric response mechanism has bee n discussed.