In this paper we discuss in detail the mechanism for hot-carrier induc
ed circuit degradation in actual 64Mb DRAM (dynamic random access memo
ry), by investigating the DRAM specification parameter shift due to tr
ansistor aging in each of the constituent circuits. It was found that
hot-carrier induced transistor aging of the circuit block does not dir
ectly affect the internal clock speed degradation, however, it does gr
eatly reduces the design margin of a circuit which suffers from heavy
loads. In addition, an in-depth study of the dynamic hot-carrier degra
dation behavior of N-channel transistors more common in actual VLSI ci
rcuits was carried out based on the alternating stress and charge pump
ing techniques.