It is known that cotunneling causes a serious decline in the reliabili
ty of single-electron logic circuits. We report the effects of cotunne
ling on single-electron logic circuits studied using computer simulati
on in which both two-electron cotunneling and normal single-electron t
unneling are taken into account. It is proved that the cotunneling red
uces the operation accuracy of single-electron logic circuits consider
ably even at absolute zero. At finite temperatures both normal tunneli
ng and cotunneling are enhanced by thermal fluctuation. Temperature de
pendence of tunneling rates of both processes is also discussed. In or
der to suppress cotunneling, we consider the tunnel resistance of junc
tions as one of the design parameters and show that the cotunneling ra
te can be reduced by optimizing the resistance. In addition, we presen
t an inverter circuit that exhibits a better tolerance of the cotunnel
ing effect.