S. Sudo et al., IMPURITY-FREE DISORDERING OF INGAAS INGAALAS QUANTUM-WELLS ON INP BY DIELECTRIC THIN CAP FILMS AND CHARACTERIZATION OF ITS INPLANE SPATIAL-RESOLUTION/, JPN J A P 1, 35(2B), 1996, pp. 1276-1279
We have studied impurity-free disordering of InGaAs/InGaAlAs quantum w
ells on Inr, induced by three different dielectric cap films, namely,
SiO2, SiNx, and SrF2. The difference in photoluminescence characterist
ics of these materials after heat treatment has been discussed. Furthe
rmore, the in-plane spatial resolution of the disordering process has
been investigated for the first time.