T. Itatani et al., ULTRAFAST METAL-SEMICONDUCTOR-METAL PHOTOCONDUCTIVE SWITCHES FABRICATED USING AN ATOMIC-FORCE MICROSCOPE, JPN J A P 1, 35(2B), 1996, pp. 1387-1389
The oxidation using an atomic force microscope was applied in the fabr
ication of ultrafast metal-semiconductor-metal photoconductive switche
s. The photoconductive gap was formed by the oxidation of a 4 nm-thick
-titanium layer. The photoconductive gap which was 100 nm wide and cov
ered with the oxidized titanium which is not only a good insulator but
also transparent to the excitation Learn. A full width at half-maximu
m response of 380 fs was obtained at a bias voltage of 10 V.