DENSIFIED SIOF FILM FORMATION FOR PREVENTING WATER-ABSORPTION

We confirmed that the density of a SiOF film was decreased by the addi tion of C2F6 as a fluorine source. Such a decrease in the density had the most significant effect on the water absorptivity. Densities of th e films were controlled by increasing O-2 gas mixture ratios. From the TDS measurements of water desorption and the change in dielectric con stants which occurred when the Blm was exposed to atmosphere, we confi rmed that the densified films had lower water absorptivity.