Mf. Zhu et al., GREEN BLUE PHOTOLUMINESCENCE FROM NANOCRYSTALLINE SI THIN-FILMS BY RAPID THERMAL-PROCESSING, Chinese Physics Letters, 13(2), 1996, pp. 145-148
The green/blue photoluminescence with peaks centered around 2.4 eV at
room temperature was observed from nanocrystalline Si thin films prepa
red by the three-step rapid thermal annealing of hydrogenated amorphou
s silicon films. Tile effect of the parameters of rapid thermal anneal
ing on the light emission was studied. A comparison of photoluminescen
ce feature between the films from the rapid thermal annealing and the
furnace annealing of a-Si:H has been carried out.