GREEN BLUE PHOTOLUMINESCENCE FROM NANOCRYSTALLINE SI THIN-FILMS BY RAPID THERMAL-PROCESSING

Citation
Mf. Zhu et al., GREEN BLUE PHOTOLUMINESCENCE FROM NANOCRYSTALLINE SI THIN-FILMS BY RAPID THERMAL-PROCESSING, Chinese Physics Letters, 13(2), 1996, pp. 145-148
Citations number
12
Categorie Soggetti
Physics
Journal title
ISSN journal
0256307X
Volume
13
Issue
2
Year of publication
1996
Pages
145 - 148
Database
ISI
SICI code
0256-307X(1996)13:2<145:GBPFNS>2.0.ZU;2-#
Abstract
The green/blue photoluminescence with peaks centered around 2.4 eV at room temperature was observed from nanocrystalline Si thin films prepa red by the three-step rapid thermal annealing of hydrogenated amorphou s silicon films. Tile effect of the parameters of rapid thermal anneal ing on the light emission was studied. A comparison of photoluminescen ce feature between the films from the rapid thermal annealing and the furnace annealing of a-Si:H has been carried out.