USE OF THE EFFECTS OF SPECIMEN CHARGING IN DIAGNOSING DIELECTRIC INHOMOGENEITIES IN LITHIUM-NIOBATE FILMS IN A SCANNING ELECTRON-MICROSCOPE

A well known method of charging the segnetoelectric surface with an el ectron probe to visualize domens and their boundaries is used to study the structure of LiNbO3 films on the silicon substrates. Some methodi cal features of charging massive samples and dielectric films on the s emiconductor surfaces are discussed. The results obtained according th e method suggested show the discharge regions in the LiNbO3 films whic h are the boundary regions between crystal and noncrystal parts of the film.