A new method of patterning crystalline organic molecular films is prop
osed and demonstrated. It utilizes a selective growth, or the differen
ce in the sticking coefficient of an organic material on various inorg
anic substrates in a certain temperature range. The object structure i
s first patterned on a single-crystalline substrate with an epitaxial
film of a different material grown by molecular beam epitaxy (MBE) thr
ough a mask, and then a beam of the organic molecule is irradiated uni
formly after removing the mask.