MAKYOH TOPOGRAPHY - CURVATURE MEASUREMENTS AND IMPLICATIONS FOR THE IMAGE-FORMATION

A new method is developed for the measurement of the radii of curvatur e R of mirror-like semiconductor wafers using the magic-mirror (Makyoh ) method. A flat mirror is placed beneath the sample, thus a second, ' 'contour'' image of the sample is formed beside the sample image itsel f. From the size deviation of the two images that results from the cur vature of the sample, R can be calculated. Experimental results obtain ed with mirrors with known curvature show good agreement with the calc ulations. Implications for the general image formation mechanism are d iscussed as well.