The three independent components of the piezo-optical tensor P(ijkl)(o
mega) have been determined in uniaxially stressed Si using rotating-an
alyzer ellipsometry. This tensor, with only three complex independent
components in the case of Si, links the changes in the real and imagin
ary parts of the dielectric tensor DELTAepsilon(ij)(omega) to an arbit
rary stress X = X(kl) [i.e., DELTAepsilon(ij)(omega) = P(ijkl)(omega)
X(kl)]. Using the experimental values Of P(ijkl)(omega)), several rela
ted functions and parameters were derived and compared with previous p
iezoreflectance, ac-stress-modulated reflectivity, Raman spectroscopy
work, and theoretical estimates. Deformation-potential constants for t
he optical transitions between 3 and 4 eV were obtained using the elli
psometric data. In addition, the different components of the piezoopti
cal tensor were calculated using the empirical pseudopotential method
and reasonable agreement between theory and experiment was found. Our
data also clarify previous problems and errors in the existing literat
ure.