A MINIATURE SELF-ALIGNED PRESSURE SENSING ELEMENT

Authors
GOUSTOURIDIS D CHATZANDROULIS S NORMAND P TSOUKALAS D
Citation
D. Goustouridis et al., A MINIATURE SELF-ALIGNED PRESSURE SENSING ELEMENT, Journal of micromechanics and microengineering, 6(1), 1996, pp. 33-35
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical
Journal title
Journal of micromechanics and microengineering → ACNP
ISSN journal
09601317
Volume
6
Issue
1
Year of publication
1996
Pages
33 - 35
Database
ISI
SICI code
0960-1317(1996)6:1<33:AMSPSE>2.0.ZU;2-8
Abstract
A new process, which is based on self-aligned ion implantations and th e silicon fusion bonding technique for fabricating capacitive pressure sensors, is described. Circular devices with radius of only 170 mu m have been fabricated and measured. These devices are designed for biom edical applications and operate with a zero-to-full scale range of 0-3 6 mm Hg.