IMPROVEMENT OF A CLASSICAL ELECTRODEPOSITION PROCESS FOR ELECTROSTATIC VARIABLE-CAPACITANCE, SIDE-DRIVE MICROMOTOR FABRICATION

Authors
SURBLED P DUFOURGERGAM E BOSSEBOEUF A GILLES JP GRANDCHAMP JP
Citation
P. Surbled et al., IMPROVEMENT OF A CLASSICAL ELECTRODEPOSITION PROCESS FOR ELECTROSTATIC VARIABLE-CAPACITANCE, SIDE-DRIVE MICROMOTOR FABRICATION, Journal of micromechanics and microengineering, 6(1), 1996, pp. 42-45
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical
Journal title
Journal of micromechanics and microengineering → ACNP
ISSN journal
09601317
Volume
6
Issue
1
Year of publication
1996
Pages
42 - 45
Database
ISI
SICI code
0960-1317(1996)6:1<42:IOACEP>2.0.ZU;2-U
Abstract
An improvement of a classical electrodeposition process through a phot oresist mold for electrostatic side-drive micromotor fabrication is pr oposed. A step of selective and quasi-conformal deposition is used to reduce the air gap and bearing clearance below the value allowed by th e maximum photoresist aspect ratio. This will allow the fabrication of variable-capacitance micromotors with better operation characteristic s.