D. Lapadatu et al., CORRUGATED SILICON-NITRIDE MEMBRANES AS SUSPENSIONS IN MICROMACHINED SILICON ACCELEROMETERS, Journal of micromechanics and microengineering, 6(1), 1996, pp. 73-76
This paper presents some theoretical considerations and experimental r
esults carried out to investigate the potential use of corrugated sili
con nitride membranes as a mechanical suspension in micromachined sili
con capacitive accelerometers.