CORRUGATED SILICON-NITRIDE MEMBRANES AS SUSPENSIONS IN MICROMACHINED SILICON ACCELEROMETERS

Authors
LAPADATU D PYKA A DZIUBAN J PUERS R
Citation
D. Lapadatu et al., CORRUGATED SILICON-NITRIDE MEMBRANES AS SUSPENSIONS IN MICROMACHINED SILICON ACCELEROMETERS, Journal of micromechanics and microengineering, 6(1), 1996, pp. 73-76
Citations number
11
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical
Journal title
Journal of micromechanics and microengineering → ACNP
ISSN journal
09601317
Volume
6
Issue
1
Year of publication
1996
Pages
73 - 76
Database
ISI
SICI code
0960-1317(1996)6:1<73:CSMASI>2.0.ZU;2-F
Abstract
This paper presents some theoretical considerations and experimental r esults carried out to investigate the potential use of corrugated sili con nitride membranes as a mechanical suspension in micromachined sili con capacitive accelerometers.