GLOBAL VISUALIZATION OF POWDER TRAPPING IN CAPACITIVE RF PLASMAS BY 2-DIMENSIONAL LASER SCATTERING

Understanding particle dynamics requires comparison of spatially resol ved measurements with two-dimensional (2-D) simulations, In this work, a cross section of a capacitive discharge is illuminated with an expa nded laser beam, and global scattered light is recorded by camera, Pla sma equipotentials are visualized using the scattered intensity from a small amount of particles trapped in an argon plasma. At low RF volta ges, good agreement is found with 2-D fluid simulations, whereas displ acement of the power clouds toward the sheaths is observed at high vol tage.