MONOCHROMATIC IMAGING OF SCATTERED LASER-LIGHT FROM IN-SITU GENERATEDPARTICLES IN PLASMAS

Spatially resolved images of particle distributions are measured in st eady-state plasmas in a GEC (gaseous electronics conference) plasma re actor, Images are obtained by monochromatic imaging of scattered laser light using a microchannel plate (MCP) image intensifier and a high-s peed video camera. The observed distributions of particulates generate d by adding small quantities of CHF3 to an argon plasma are extremely complex and diverse, The patterns observed are temporally varying, and rarely as simple as domes and rings observed in other reactors, The f orces acting on the particles are sufficiently complex that reproducin g specific spatial patterns by controlling processing parameters is of ten impossible.