IN-SITU SENSOR OF SPATIALLY-RESOLVED OPTICAL-EMISSION

Authors
BUIE MJ PENDER JTP HOLLOWAY JP BRAKE ML
Citation
Mj. Buie et al., IN-SITU SENSOR OF SPATIALLY-RESOLVED OPTICAL-EMISSION, IEEE transactions on plasma science, 24(1), 1996, pp. 111-112
Citations number
9
Categorie Soggetti
Phsycs, Fluid & Plasmas
Journal title
IEEE transactions on plasma science → ACNP
ISSN journal
00933813
Volume
24
Issue
1
Year of publication
1996
Pages
111 - 112
Database
ISI
SICI code
0093-3813(1996)24:1<111:ISOSO>2.0.ZU;2-4
Abstract
An experimental study of the uniformity of the plasma emission from th e gaseous electronics conference reference cell was conducted using a diagnositic technique refined at the University of Michigan known as s patially resolved optical emission spectroscopy (SR-OES). This diagnos tic will provide immediate spatially resolved feedback regarding the p lasma species emissivity.