2-DIMENSIONAL IMAGES OF CF2 DENSITY IN CF4 AR PLASMAS BY LASER-INDUCED FLUORESCENCE IN A GEC RF REFERENCE CELL/

Spatially resolved two dimensional (2-D) maps of the relative CF2 dens ity in low-pressure CF4/Ar RF discharges, generated within a parallel- plate gaseous electronics conference (GEC) reference reactor, have bee n obtained using planar laser-induced fluorescence imaging (PLIF). The results illustrate the changes in CF2 density and distribution in the central plane of the discharge region as flowrate is varied over 10-1 00 seem at constant power and pressure, and as pressure is varied over 13.3-133.3 Pa at constant flowrate and power.