2-DIMENSIONAL ANALYSIS OF RADIO-FREQUENCY DISCHARGES

Authors
MEYYAPPAN M GOVINDAN TR
Citation
M. Meyyappan et Tr. Govindan, 2-DIMENSIONAL ANALYSIS OF RADIO-FREQUENCY DISCHARGES, IEEE transactions on plasma science, 24(1), 1996, pp. 119-120
Citations number
4
Categorie Soggetti
Phsycs, Fluid & Plasmas
Journal title
IEEE transactions on plasma science → ACNP
ISSN journal
00933813
Volume
24
Issue
1
Year of publication
1996
Pages
119 - 120
Database
ISI
SICI code
0093-3813(1996)24:1<119:2AORD>2.0.ZU;2-6
Abstract
A two-dimensional (2-D) model for the charged particle transport in ra dio frequency capacitively coupled discharges is presented, The model consists of the three moments of the Boltzmann equation with rate cons tants for inelastic processes from a zero-dimensional Boltzmann solver . Variation of electron density, potential, and excitation rates insid e the reactor is presented and discussed for an argon discharge.