MODELING AN INDUCTIVELY-COUPLED PLASMA REACTOR WITH CHLORINE CHEMISTRY

Inductively coupled plasma reactors are now one of the most important of the high-density plasma processing tools that have been developed i n recent Sears. We present results from a two-dimensional (2-D) time-d ependent fluid model of a chlorine plasma discharge, The steady-state values for the plasma potential, and the ion fluxes for Cl-2(+) and Cl - are shown for a simulation of the Lawrence Livermore National Labora tory (LLNL) large area inductively coupled reactor experiment, The cou nter streaming of positive and negative ions is evident, The flux of C l-2(+) is highly uniform over the lower surface of the reactor.