P. Vitello et al., MODELING AN INDUCTIVELY-COUPLED PLASMA REACTOR WITH CHLORINE CHEMISTRY, IEEE transactions on plasma science, 24(1), 1996, pp. 123-124
Inductively coupled plasma reactors are now one of the most important
of the high-density plasma processing tools that have been developed i
n recent Sears. We present results from a two-dimensional (2-D) time-d
ependent fluid model of a chlorine plasma discharge, The steady-state
values for the plasma potential, and the ion fluxes for Cl-2(+) and Cl
- are shown for a simulation of the Lawrence Livermore National Labora
tory (LLNL) large area inductively coupled reactor experiment, The cou
nter streaming of positive and negative ions is evident, The flux of C
l-2(+) is highly uniform over the lower surface of the reactor.