STRUCTURE OF TIN COATINGS

The micro- and pico-structures of TiN films deposited by magnetron spu ttering are related to their properties and deposition conditions. The transition from porous to compact films and the changes in their micr ohardnesses, lattice parameters and microstrains are controlled by the temperature of deposition, gas pressure and energy of ion bombardment . The extended crystallographic anisotropy of inhomogeneous lattice de formations is a new phenomenenon in which thin polycrystalline films d iffer from bulk stress-free materials.