Thin amorphous alumina coatings have been deposited on polyethylene te
rephthalate (PET) by r.f. magnetron sputtering in a pure argon plasma.
The study deals with the influence of the deposition parameters (plas
ma pressure and r.f power) on the assembly properties. SEM micrographs
show that the alumina microstructure was variable within a wide range
, from dense to columnar. The O/Al ratio determined by Rutherford back
scattering spectrometry (RBS) was found to increase with plasma pressu
re. FTIR spectra of oxygen-rich alumina have shown that the excess oxy
gen in the coatings was essentially due to hydroxyl groups. XPS analys
es used to investigate the adhesion mechanism involved at the alumina/
PET interface revealed the formation of an interface including Al-O-C
bonds.