STRUCTURAL CHARACTERIZATION OF B4C FILMS DEPOSITED BY LASER-ASSISTED CVD

Authors
OLIVEIRA JC OLIVEIRA MN CONDE O
Citation
Jc. Oliveira et al., STRUCTURAL CHARACTERIZATION OF B4C FILMS DEPOSITED BY LASER-ASSISTED CVD, Surface & coatings technology, 80(1-2), 1996, pp. 100-104
Citations number
15
Categorie Soggetti
Materials Science, Coatings & Films
Journal title
Surface & coatings technology → ACNP
ISSN journal
02578972
Volume
80
Issue
1-2
Year of publication
1996
Pages
100 - 104
Database
ISI
SICI code
0257-8972(1996)80:1-2<100:SCOBFD>2.0.ZU;2-I
Abstract
Boron carbide (B4C) coatings were deposited on fused silica substrates by LCVD with a CO2 laser. A reaction gas mixture of BCl3, CH4 and H-2 was used. The coatings were characterised by glancing incidence X-ray diffraction, Raman microprobe spectroscopy and electron probe microan alysis. The influence of gas-phase composition and laser parameters on the phase and chemical composition of the deposits were investigated.