LASER-ABLATED DIAMOND-LIKE CARBON COATINGS ON SEMICONDUCTORS AND HIGH-T-C SUPERCONDUCTORS

Authors
KARUZSKII AL MELNIK NN MITYAGIN YA MURZIN VN NOZDRIN VS PERESTORONIN AV VOLCHKOV NA ZHURKIN BG
Citation
Al. Karuzskii et al., LASER-ABLATED DIAMOND-LIKE CARBON COATINGS ON SEMICONDUCTORS AND HIGH-T-C SUPERCONDUCTORS, Surface & coatings technology, 80(1-2), 1996, pp. 233-236
Citations number
10
Categorie Soggetti
Materials Science, Coatings & Films
Journal title
Surface & coatings technology → ACNP
ISSN journal
02578972
Volume
80
Issue
1-2
Year of publication
1996
Pages
233 - 236
Database
ISI
SICI code
0257-8972(1996)80:1-2<233:LDCCOS>2.0.ZU;2-1
Abstract
Diamond-like carbon coatings were prepared by pulsed laser ablation of a graphite target in a high-vacuum (similar to 10(-6) Torr) environme nt on Si, SiO2 and single-crystal YBa2Cu3O7 film substrates. Investiga tions by a variety of spectroscopic techniques demonstrate that the fi lms had a high density (similar to 2.9 g cm(-3)) close to that of diam ond, a high ratio of sp(3) to sp(2) bonding (0.75/0.25), and IR transp arency. The films were hard, adhesive to the substrate and had a high resistivity. The parameters of the growth process that allows producti on of DLC films with high water-resistance properties on YBa2Cu3O7 sub strates have been determined.