PERFORMANCES PRESENTED BY LARGE-AREA THIN-FILM POSITION-SENSITIVE DETECTORS BASED ON AMORPHOUS-SILICON

Authors
FORTUNATO E LAVAREDA G SOARES F MARTINS R
Citation
E. Fortunato et al., PERFORMANCES PRESENTED BY LARGE-AREA THIN-FILM POSITION-SENSITIVE DETECTORS BASED ON AMORPHOUS-SILICON, Thin solid films, 272(1), 1996, pp. 148-156
Citations number
22
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
272
Issue
1
Year of publication
1996
Pages
148 - 156
Database
ISI
SICI code
0040-6090(1996)272:1<148:PPBLTP>2.0.ZU;2-3
Abstract
This paper presents a low-cost technology for the realisation of large -area thin film position-sensitive detectors using the a-Si:H technolo gy. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems, suc h as: machine tool alignment and control; angle measuring; rotation mo nitoring; surface profiling; medical instrumentation; targeting; remot e optical alignment; guidance systems; etc., to which automated inspec tion control is needed.