The effect of adding carbon dioxide (CO2) to the reactant gases was st
udied in a dc arc plasma jet chemical vapour deposition (CVD) for the
synthesis of diamond films. The fabricated films were characterized by
Raman scattering spectroscopy and scanning electron microscopy. Witho
ut CO2, Raman spectra of these films display only graphitic peaks. As
CO2 is added, faceted diamond crystal is observed in micrographs from
scanning electron microscopy and a sharp diamond peak in the Raman spe
ctrum appears. At a CO2/CH4 ratio of 2.0, diamond films exhibit a pure
diamond Raman peak at 1333 cm(-1) with small nondiamond carbon peaks.
In addition, plasma diagnosis was performed using optical emission sp
ectroscopy.