Pb(Zr0.53Ti0.47)O-3 (PZT 53/47) is a polycrystalline film with coarse
square-shaped grains. The surface morphology can be improved by reduci
ng the cooling rate at the Curie temperature region; however this morp
hology still does not meet the requirement of device engineering. Pb(Z
r0.2Ti0.8)O-3 (PZT 20/80) film has been synthesized, to reduce the lat
tice mismatch between PZT and substrate. This film has a smooth surfac
e without any evident crystalline features. A TEM of the cross-section
al PZT/YBa2Cu3O7 (YBCO) integrated film shows there is no interaction
between the PZT, YBCO and substrate. ZrO2 particles are detected in th
e PZT film.