M. Hidaka et al., A MAGNETICALLY COUPLED SQUID FOR THE DIGITAL READOUT OF INTEGRATED HTS CIRCUITS, Superconductor science and technology, 9(4A), 1996, pp. 62-65
A magnetically coupled SQUID (superconducting quantum interference dev
ice) for the digital readout of integrated HTS (high-temperature super
conductor) circuits has been developed and a multilayer integration pr
ocess for HTS circuits was evaluated. We employed ramp edge junctions
in this process; the SQUID's control line was formed using the counter
layer of the junctions. Three ex situ epitaxial layers were grown. io
n beam etchings were used for the base electrode and insulation layer
without substrate rotation. Clear voltage modulation for the SQUID was
observed up to 65 K. The critical current of the 4 mu m wide control
line was 1.2 mA at 65 K.