ELECTRICAL AND OPTICAL-PROPERTIES OF ZNO THIN-FILMS PREPARED BY THE PYROSOL METHOD

Undoped and aluminum-doped zinc oxide (ZnO:Al) thin films were prepare d on heated Coming 7059 glass substrates by the pyrosol method under v arious deposition conditions. The effects of the different deposition variables and the annealing conditions in vacuum were investigated by analyzing the electrical, optical, morphological, and compositional ch anges of the films. The results indicated that it was possible to obta in ZnO:Al films with a transmittance of about 80% and a resistivity as low as 3.5 x 10(-3) Omega . cm. Furthermore, it was also found that t he films were stable in a hydrogen plasma atmosphere within an exposur e time of 10 minutes.