EARLY STAGES OF NUCLEATION AND GROWTH OF DIAMOND FILM BY AES, SEM, UPS AND OPTICAL REFLECTIVITY TECHNIQUES - SURFACE-COMPOSITION

We have investigated the morphology, chemical bonds and electronic sta tes of CVD carbon grown on silicon (111) substrates by means of scanni ng electron microscopy (SEM), Auger electron spectroscopy (AES), ultra violet photoemission spectroscopy (UPS) and optical reflectivity. Both AES and UPS techniques show variations in the observed spectra if ref erred to samples at different stages of growth. The optical reflectivi ty technique has also been used in order to study the diamond-substrat e interface and to quantify the film thickness.