M. Mikou et al., EXPERIMENTAL-STUDY BY IN-SITU RESISTIVITY MEASUREMENTS OF SWIFT HEAVY-ION-INDUCED DEFECTS IN GAAS CRYSTALS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 107(1-4), 1996, pp. 246-249
Gallium arsenide thin crystals were irradiated at GANIL with swift ion
s (oxygen, magnesium, argon, zinc, krypton, xenon) at various energies
(0.13-5.7 GeV). From the DLTS spectrum, the introduced defects are sh
own to be paint defects, similar to those obtained by fast electron an
d neutron irradiation, This study is concerned with extended results o
btained from ''in situ'' resistivity measurements during 300 and 77 K
irradiation, The investigated materials are LEC grown (Si-doped n-type
and Zn-doped p-type) thinned crystals (6-300 mu m thick) and, for the
first time, epitaxial MOCVD n-type GaAs grown on SI GaAs substrates.
Comparison of the various resistivity-fluence curves obtained for diff
erent ions and different energies shows a small dispersion for epitaxi
al material but a large one for LEC GaAs. The variations seem to be co
rrelated with the electronic stopping power S-e (in the range 1-20 MeV
/mu m) and suggest a slight defect annealing by electronic excitation.