S. Brunner et al., POLYMER-BASED WAVE-GUIDING STRUCTURES OBTAINED BY ION-BEAM IRRADIATION AT DIFFERENT ENERGIES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 107(1-4), 1996, pp. 333-336
Polymethylmethacrylate (PMMA) samples were modified by ion beam irradi
ation in order to generate regions of increased refractive index. Ion
beams of various atomic masses and energies were used. Planar waveguid
es as well as structured waveguides were generated. Passive components
, e.g. splitters and Mach-Zehnder interferometers, were fabricated. Ap
plying ion beams of 1.4 MeV/u energies the generated structures are bu
ried in a certain depth. Different masking techniques were used. First
results with a newly developed material (PMMI) are presented. Attenua
tion measurements at different wavelengths are reported.