APPLICATIONS OF THE NORMAL-INCIDENCE ROTATING-SAMPLE ELLIPSOMETER TO HIGH-SPATIAL-FREQUENCY AND LOW-SPATIAL-FREQUENCY GRATINGS

The normal-incidence rotating-sample ellipsometer is an instrument tha t can be used to characterize grating surfaces from the measured ratio rho of complex reflection coefficients r(y)/r(x) of light polarized p erpendicular and parallel to the grating groove direction. Experimenta l results at different wavelengths for different gratings with spatial frequencies from 150 to 5880 grooves/mm are presented. The groove dep th of the 5880-grooves/mm gold-coated grating can be estimated from th e measured rho and rigorous grating theory. (C) 1996 Optical Society o f America