The effect of the temperature on the first stages of the titanium oxid
ation process has been followed by means of Auger electron spectroscop
y. We found, using principal component analysis, two different regimes
depending on the substrate temperature. For temperatures below 200 de
grees C the oxidation is characterized by the presence of only one oxi
de phase: TiO2. At higher temperatures, the presence of Ti2O3 is detec
ted from the beginning of the process.