HIGH-RESOLUTION PROFILOMETRY BY USING PHASE CALCULATION ALGORITHMS FOR SPECTROSCOPIC ANALYSIS OF WHITE-LIGHT INTERFEROGRAMS

Authors
SANDOZ P TRIBILLON G PERRIN H
Citation
P. Sandoz et al., HIGH-RESOLUTION PROFILOMETRY BY USING PHASE CALCULATION ALGORITHMS FOR SPECTROSCOPIC ANALYSIS OF WHITE-LIGHT INTERFEROGRAMS, J. mod. opt., 43(4), 1996, pp. 701-708
Citations number
13
Categorie Soggetti
Optics
Journal title
J. mod. opt. → ACNP
ISSN journal
09500340
Volume
43
Issue
4
Year of publication
1996
Pages
701 - 708
Database
ISI
SICI code
0950-0340(1996)43:4<701:HPBUPC>2.0.ZU;2-F
Abstract
The proposed profilometer is based on an optical spectral analysis of white-light interferograms. Phase calculation algorithms are applied w ithin the spectral domain for high-resolution profilometry. Absolute o ne-way optical path differences are measured without any axial scannin g of the interferometer. This method is well adapted for the analysis of rough or binary surfaces with a 1 nm resolution.