EVALUATION OF CHARGE TRANSITION IN A SMALL-GAP DISCHARGE

The charge neutralized at a small gap discharge has been evaluated fro m measured electromagnetic fields by two methods. The small gap discha rges simulate ESD events. The evaluated charge decreases rapidly as a step shape immediately in a moment of the discharge. The accumulated s tatic charge and the risetime of the neutralization step increase with the gap length. When the gap length is 0.1mm, risetime and the initia l static charge are about 0.3 ns and 5.6 nC, respectively.