DEPENDENCE OF STRUCTURAL AND MAGNETIC-PROPERTIES ON DEPOSITION ANGLE IN ELECTRON-BEAM EVAPORATED CO PT MULTILAYER THIN-FILMS/

The effects of deposition angle on the structural and magnetic propert ies of e-beam evaporated Co/Pt multilayer thin films prepared on tilte d substrates were examined. It was found that the [111] crystallograph ic orientations of the multilayer thin films were not aligned with col umnar growth orientations and that they remained normal to the substra te planes, irrespective of deposition angle, even though the depositio n angle was severely oblique up to 60 degrees. Interestingly enough, t he magnetic easy axis orientation was nearly aligned with the substrat e normal, irrespective of deposition angle, which suggested that surfa ce anisotropy was a major reason for the perpendicular anisotropy in C o/Pt multilayer thin films. (C) 1996 American Institute of Physics.