A. Tsoukatos et al., CR-BACKSLASH(COPTCR,COPTX) LAYERED FILM STUDIES FOR HARD BIAS APPLICATIONS, Journal of applied physics, 79(8), 1996, pp. 5018-5020
Cr\(CoPtCr,CoPt) films were deposited on oxidized Si (100) substrates
via de magnetron sputtering. Process parameters, such as deposition ra
tes, number of bilayers, and bias voltage, were varied to achieve the
hard magnetic properties without thermal processing of the films. Coer
civities in the range of 2000 Ok, with corresponding squareness of abo
ut 0.8-0.9, and remanent magnetization in the gange (3-3.6) memu/cm(3)
, were achieved by identification of the optimum conditions. (C) 1996
American Institute of Physics.