ULTRAMICRO FABRICATIONS ON, FE-NI ALLOY-FILMS USING ELECTRON-BEAM WRITING AND REACTIVE-ION ETCHING

Authors
NAKATANI I
Citation
I. Nakatani, ULTRAMICRO FABRICATIONS ON, FE-NI ALLOY-FILMS USING ELECTRON-BEAM WRITING AND REACTIVE-ION ETCHING, Journal of applied physics, 79(8), 1996, pp. 5067-5067
Citations number
NO
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
79
Issue
8
Year of publication
1996
Part
2A
Pages
5067 - 5067
Database
ISI
SICI code
0021-8979(1996)79:8<5067:UFOFAU>2.0.ZU;2-7