IMPROVEMENT OF SOFT MAGNETISM OF FE90CO10 SPUTTERED FILMS BY ADDITIONOF N AND TA

The addition of Ta and N into sputtered Fe90Co10 alloy films was perfo rmed to attain soft magnetism with large saturation magnetization 4 pi M(s) of about 21 kG. The deposition of Fe-Co and Fe-Co-Ta films at N- 2 partial pressure P-N2 below 0.1 m Torr was so effective as to cause fine granulation in the film. Fe84.6Co8.4Ta7:N films deposited at P-N2 of about 0.2 mTorr and postannealed at 150 degrees C revealed 4 pi M( s) and relative permeability mu(r) of about 16 kG and 1500, respective ly. (C) 1996 American Institute of Physics.