The microstructure of the laser-ablated YBa2Cu3O7 (YBCO) thin film dep
osited on heated (100) SrTiO3 substrate was examined by transmission e
lectron microscope. The particles on the film mainly consist of CuO an
d few CuYO2. Most of these non-superconducting particles nucleate on o
r near the surface of the film and protrude about 100-400 nm in height
. A large amount of alpha-axis YBCO grains also exist in the film, whi
ch nucleate at the substrate surface and grow perpendicularly above th
e c-axis YBCO film. The YBCO thin film deposited under law oxygen pres
sure has very different microstructure compared with YBCO thin film de
posited under high oxygen pressure.