SINGLE-STRUCTURE HEATER AND TEMPERATURE SENSOR USING A P-TYPE POLYCRYSTALLINE DIAMOND RESISTOR

Authors
YANG GS ASLAM DM
Citation
Gs. Yang et Dm. Aslam, SINGLE-STRUCTURE HEATER AND TEMPERATURE SENSOR USING A P-TYPE POLYCRYSTALLINE DIAMOND RESISTOR, IEEE electron device letters, 17(5), 1996, pp. 250-252
Citations number
11
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
IEEE electron device letters → ACNP
ISSN journal
07413106
Volume
17
Issue
5
Year of publication
1996
Pages
250 - 252
Database
ISI
SICI code
0741-3106(1996)17:5<250:SHATSU>2.0.ZU;2-A
Abstract
Heat generation and temperature sensing are reported in a single p-typ e diamond resistor fabricated on an oxidized Si substrate using diamon d film technology compatible with integrated circuit (IC) processing. Power densities in access of 600 W/in.(2) are observed for the heaters , The temperature response of the sensor is characterized in the tempe rature range of 300-725 K, Such a diamond heater/sensor device is repo rted for the first time.