MULTICHANNEL SAW CHEMICAL SENSOR USING 90MHZ SAW RESONATOR AND MOLECULAR FILMS DEPOSITED BY DROPLET-SURFACE CASTING METHOD

The objective of the present study is to build a chemical sensor utili zing the feature of a high frequency SAW device for enhansing the sens or sensitivity and the feasibility of making a multi-channel structure on the substrate for integration of plural sensors. We developed the fine casting method (which was named as ''droplet - surface casting me thod''), and deposited several kinds of adsorption films on the channe ls of a SAW device. The device was ST cut Quartz 90MHz SAW resonator c hips, each of which has 2 resonators on a substrate. We constructed 4- channel odor sensing system that have one reference channel and three sensing channels using the two chips, and measured the response patter ns of the organic solvents which have same carbon number and different atomic groups.