WORK FUNCTION OF INDIUM TIN OXIDE TRANSPARENT CONDUCTOR MEASURED BY PHOTOELECTRON-SPECTROSCOPY

Authors
PARK Y CHOONG V GAO Y HSIEH BR TANG CW
Citation
Y. Park et al., WORK FUNCTION OF INDIUM TIN OXIDE TRANSPARENT CONDUCTOR MEASURED BY PHOTOELECTRON-SPECTROSCOPY, Applied physics letters, 68(19), 1996, pp. 2699-2701
Citations number
13
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
68
Issue
19
Year of publication
1996
Pages
2699 - 2701
Database
ISI
SICI code
0003-6951(1996)68:19<2699:WFOITO>2.0.ZU;2-5
Abstract
We used ultraviolet and x-ray photoelectron spectroscopy (XPS) and (UP S) techniques to directly measure absolute values of vacuum work funct ion of indium tin oxide (ITO) thin films. We obtained a work function of 4.4-4.5 eV which is lower than the commonly cited value. These valu es do not change substantially by heating and Ar ion sputtering. The a tomic concentrations of each element in ITO, measured with XPS, are al so quite stable under heat treatment and ion sputtering. (C) 1996 Amer ican Institute of Physics.