SECONDARY-ION MASS-SPECTROSCOPY STUDY OF AU TRAPPING AND MIGRATION INTHE AU-IRRADIATED YBA2CU3O7-DELTA FILM()

The range data and migration of Au in YBa2Cu3O7-delta film were studie d with implanted Au-197 (1.5 MeV 5 x 10(15) Au+/cm(2)) as a tracer. Th e film was a c-axis oriented film, similar to 750 nm thick, deposited by high-pressure planar de sputtering on [100] LaAlO3. Analysis by sec ondary ion mass spectroscopy shows that the as-implanted Au concentrat ion distribution is essentially Gaussian-like and the depth ((R) over cap(p)) of maximum Au concentration (similar to 1,2 wt%) is 201 nm. Th e projected range ((R) over bar(p)) acid ((R) over cap(p)) are found t o be in very good agreement with the simulated data by TRIM-95, wherea s the measured ''straggle'' (Delta R(p)) is about 20% larger than tha t by TRIM-95 simulation. It has also been found that the implanted Au- 197 starts to migrate within the film at a temperature between 650 and 700 degrees C, which is much higher than that for the implanted H-2 ( similar to 175 degrees C) and the implanted O-18 (between 250 and 300 degrees C) in c-oriented YBa2Cu3O7-delta films. (C) 1996 American Inst itute of Physics.