High-energy ion backscattering spectroscopy (HEIS) and X-ray photoelec
tron spectroscopy (XPS) were used to determine the growth mode and the
interface structure of ultrathin Pd films deposited on Al(001) surfac
es at room temperature. Measured Al and Pd surface peak areas for MeV
He+ ions incident normal to the surface show that Pd atoms intermix wi
th and displace Al substrate atoms. The mixing continues for Pd covera
ges from 0-5 monolayers, at which point a Pd metal film begins to grow
on the alloy surface. XPS measurements of the Pd 3d photopeaks show a
chemical shift that is consistent with the formation of an AlPd-like
compound during the mixing phase, and Pd metal thereafter. HEIS result
s further reveal that the alloyed overlayer as well as the Pd metal fi
lm have some degree of axial alignment with respect to the Al substrat
e. The XPS intensity measurements are consistent with this two-stage g
rowth model.